A Micro Static Fourier Transform Spectrometer Based on MOEMS Technology

摘要

Nowadays, Fourier transform spectrometer has been an indispensable instrument widely used in many field. But the modulation mode of most actual FTS is time modulation. It gets the interferogram through a driving system that pushes the moving mirror to scan the optical path difference (OPD). The high-precision driving system decreases the instrumental stability; it increases the size and the mass of the FTS as well. At the same time, due to the limit of the application environment, the micro stable FTS becomes the exigent requirement in some high and new technology field, such as space detection, environmental monitoring, security inspection and meteorological observation, and so on. In this paper, a new-style micro FTS which was modulated by stepped mirrors was advanced. The principle diagram was shown in Fig. 1.