90纳米CMOS双阱工艺下STI深度对电荷共享的影响

摘要

基于3维TCAD器件模拟,研究了90nm CMOS双阱工艺下STI对电荷共享的影响.研究结果表明:增大STI深度能有效抑制NMOS电荷共享,且550nm为抑制电荷共享的有效深度,超过这个深度收集的电荷量几乎保持不变;而对于PMOS,STI深度的增加使电荷共享线性减小.这对于电荷共享加固具有重要指导意义.%THe dependence of various STI depths on charge sharing in 90nm dual well CMOS technology was investigated. TCAD simulation results show that increasing STI can restrain charge sharing of NMOS effectively, and 550nm is the effective depth for the prevention of charge diffusion, beyond which the collected charge almost keeps constant; for PMOS, charge sharing decreases linearly with the increment of STI depth. This conclusion is useful for irradiation-hardness.