平面二自由度并联执行机构的设计与实现

摘要

A parallel x-y manipulator system for an epoxy writing application is developed. The best advantage of the system is a significant reduction in size of the present epoxy writing system. The other primary advantage is to increase rigidity of the parallel mechanism, thus ensur faster operation with higher accuracy and improved tracking performance. It shows that the tracking error is smaller than 0.5!mm.%介绍了作者研制的一种用于半导体制造设备上的x-y并联执行机构。通过增加一个冗余运动链，使得该机构在工作空间内没有奇异点。该机构的最大特点是可以大大减少现有机构的体积，并具有较高的刚度，可以在高速运动条件下具有较高的运动精度和跟踪性能。实验结果表明，该系统的轨迹跟踪误差均低于0.5!mm。