Cluster size dependence of surface morphology after gas cluster ion bombardments

摘要

Cluster size dependence of the surface morphology of gold was investigated using a size-selected gas cluster ion irradiation system equipped with a strong permanent magnet. In addition to the cluster size effects, the incident angle dependence of surface morphology was studied. At normal incidence, a gold surface was smoothed after irradiation with any size of cluster ions. At the incident angle of 45° and 60°, ripples with wavelength of several hundreds of nanometers were formed; however, there was no significant cluster size dependence of ripple structures. When the incident angle was increased to 70° or 80°, the direction of the ripples became parallel to the incident angles and the cluster size dependence became remarkable.