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机译:注入氦气的硅的退火效应
Institute of Modem Physics, Chinese Academic of Sciences, 509 Nanchang Road, Lanzhou 730000, China;
Institute of Modem Physics, Chinese Academic of Sciences, 509 Nanchang Road, Lanzhou 730000, China;
Institute of Modem Physics, Chinese Academic of Sciences, 509 Nanchang Road, Lanzhou 730000, China;
Institute of Modem Physics, Chinese Academic of Sciences, 509 Nanchang Road, Lanzhou 730000, China;
Institute of Modem Physics, Chinese Academic of Sciences, 509 Nanchang Road, Lanzhou 730000, China;
atomic force microscopy; raman spectroscopy; surface morphology; implantation;
机译:等离子体浸没离子注入对氦气注入硅样品的退火作用
机译:氦效应于植入溶液中的IASCC易感性退火,冷加工和植入后退火316L钢
机译:氦注入和后续退火过程中硅中空洞逸出的数学模型
机译:注入后退火过程中氢和氦注入硅中缺陷形成的低温光致发光特性
机译:晶体取向对面向等离子体的钨表面中注入低能氢,氦和氢/氦混合物的影响。
机译:氦辐照和注入对非晶碳化硅结构的影响
机译:通过氢和氦注入以及随后的退火在硅中引入辐射缺陷和热供体
机译:硅注入砷化镓的辐射损伤与退火效应研究。