The influence of the microstructure evolution on the surface morphology in the annealing process of helium-implanted spinel

摘要

Single-crystalline spinel (MgAl_2O_4) specimens were implanted with helium ions of 100 keV at three successively increasing fluences of (0.5, 2.0 and 8.0) × 10~(16) ions/cm~2 at room temperature. The specimens were subsequently annealed in vacuum at different temperatures ranging from 500 to 1100 ℃. Different techniques, including Fourier transformed infrared spectroscopy (FTIR), thermal desorption spectrometry (TDS), atomic force microscopy (AFM) and scanning electron microscopy (SEM) were used to investigate the specimens. It was found that the absorbance peak in the FTIR due to the stretching vibration of the Al-0 bond shifts to smaller wave numbers with increasing fluence. shifting back to larger wave numbers with an increase of annealing temperature. The absorbance peak shift has a linear relationship with the fluence increase in the as-implanted state, while it does not have a linear relationship with the fluence increase after the annealing process. Surface deformation occurred in the specimens implanted with fluences of 2.0 and 8.0 × 10~(16) ions/cm~2 in the annealing process. The phenomena described above can be attributed to differences in defect formation in the specimens.