A mathematical model for describing the relationship betweenelectrical conductivity and the thickness of bilayer, ratio ofsublayer thickness of a nano-scale multilayer material (MLM) is pre-sented. Fe/Cu MLM was synthesized by electron beam physical vapordeposition (EB-PVD) tech- nique, and the dependence of electricalconductivity of Fe/Cu MLM on the bilayer thickness and ratio ofsublayer thickness were investigated. It is shown that the electricalconductivity of Fe/Cu MLM with fixed ratio of sublayer thicknessdecreases sharply when the thickness of bilayer becomes thinner than30 nm. When the bilayer thickness is kept constant, the electricalconductivity linearly decreases with the increasing ratio of sublayerthickness. The values of parameters in the model were obtained byfit- ting the measured results of electrical conductivity of Fe/CuMLM with fixed ratio of sublayer thickness. It is found that thecalculated values agree well with measured ones.
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