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Dual Beam System (SEM/FIB) Equipment for the Kleberg Advanced Microscopy Center

机译:用于Kleberg高级显微镜中心的双光束系统(SEM / FIB)设备

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摘要

The Dual-Beam microscope (SEM/FIB) has been installed in the Kleberg Advanced Microscopy Center at UTSA. The SEM/FIB has opened new research opportunities and initiated new projects with other institutions and industry in the region. The model of the microscope is a Zeiss Cross-Beam 340 which is a new design manufactured in Germany. The new Zeiss CrossBeam 340 has novel capabilities for the preparation of samples for transmission electron microscopy (TEM), 3D reconstruction of milling of surfaces, and deposition of films with five injector sources (W,Pt,SiO,C,XeF2). The SEM/FIB is also equipped with an Omniprobe manipulator for the extraction of thin samples(lamellas) for TEM. In addition, the instrument has a detector for chemical analysis (EDS) and other detectors for imaging such as bright field, dark field, back scatter electrons and transmission. The new instrument has served for the research and education programs in Physics, Chemistry and Materials within UTSA and Alamo Community Colleges in the city of San Antonio. The microscope has also been used for teaching in the advanced microscopy course for undergraduate and graduate students. Finally with the new microscope has been used for research projects with publications in high impact scientific journals and also for presentations in conferences.

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