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MANUFACTURING METHOD OF LIGHT TRAPPING STRUCTRURE USING ANODIZING PROCESS AND LIGHT TRAPPING STRUCTURE
MANUFACTURING METHOD OF LIGHT TRAPPING STRUCTRURE USING ANODIZING PROCESS AND LIGHT TRAPPING STRUCTURE
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机译:利用阳极氧化工艺及光陷获结构制造光陷获结构的方法
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摘要
One embodiment of the present invention relates to a method of manufacturing an optical capturing electrode structure using anodic oxidation, comprising: (S10) stacking and heat treating an aluminum layer; and performing an electrolytic polishing process on the heat-treated aluminum layer A step (S40) of performing a first anodic oxidation process on the surface of the electrolytically polished aluminum layer; a step (S50) of selectively etching the oxide formed through the anodic oxidation process; A step (S60) of performing a second anodization process on the aluminum layer (S60) and a step (S70) of performing an isotropic etching on the surface of the aluminum layer on which the second anodization process has been performed The present invention also provides a method for manufacturing an optical capturing electrode structure using the above process.;
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