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Method and apparatus for dynamic characterization of reliability wearout mechanisms

机译:动态表征可靠性磨损机制的方法和装置

摘要

A method and apparatus for dynamic characterization of reliability wearout mechanisms is disclosed. The system comprises an integrated circuit incorporating a device under test to be measured, structure for inputting a waveform to the device under test for a first predetermined time interval, structure for disabling the inputting of the waveform to the device under test, structure for measuring one or more fundamental parameters of the device under test after a second predetermined time interval, and structure for calculating an aging estimate of the device under test without the influence of recovery effect based on the one or more measured fundamental parameters. The time between stressing and measurement is precisely controlled, providing for repeatable experiments, and serves to minimize measurement error caused by recovery effects.
机译:公开了一种用于动态表征可靠性磨损机制的方法和设备。该系统包括集成电路,该集成电路包括待测设备,用于在第一预定时间间隔内将波形输入到待测设备的结构,用于禁止将波形输入到待测设备的结构,用于测量一个的结构。在第二预定时间间隔之后,所述被测设备的一个或多个基本参数,以及用于基于所述一个或多个测得的基本参数在不受恢复效果影响的情况下计算被测设备的老化估计的结构。精确控制应力和测量之间的时间,以提供可重复的实验,并最大程度地减少由恢复效应引起的测量误差。

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