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Substrate transfer apparatus and a substrate processing apparatus using the same, and a substrate transfer method used for them.
Substrate transfer apparatus and a substrate processing apparatus using the same, and a substrate transfer method used for them.
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机译:基板搬送装置及使用该基板搬送装置的基板处理装置及其所使用的基板搬送方法。
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摘要
PROBLEM TO BE SOLVED: To provide a substrate transport device where substrate transport time can be shortened, and to provide a substrate processor using the device and a substrate transporting method used for them.;SOLUTION: In a substrate transfer operation of an indexer robot 13 and a center robot 36, an indexer-side upper hand 165 and an indexer side lower hand 175 simultaneously advance to a substrate transfer position S. Thus, processes of the transfer operation can be reduced compared to a case when the indexer side hand 165 and the indexer side lower hand 175 alternately advance and a processed substrate W1 and an unprocessed substrate W2 are transferred. When the indexer side upper hand 165 is caused to precedently reach the substrate transfer position S, a situation that the substrate drops does not occur even if the indexer side upper hand 165 is caused to reach the substrate transfer position S at high advance speed since it is in an empty-handed state.;COPYRIGHT: (C)2006,JPO&NCIPI
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