以乙二醇甲醚为溶剂,采用Sol-Gel法制备出具有C轴取向、可导电的Al3+离子掺杂ZnO透明薄膜,并利用场发射扫描电镜、X-射线衍射、能谱分析、标准四探针和反射光谱仪等对薄膜的组成、结构和光学性能进行了分析.结果表明:Al3+离子掺杂ZnO薄膜为六方纤锌矿型结构,由六棱柱状阵列构成,具有C轴择优取向；薄膜电阻率随Al3+离子掺杂浓度的升高而降低；在可见光区域,薄膜透光率随Al3+离子掺杂浓度的升高而降低,掺杂3％ ZnO薄膜的透光率达到90％左右,禁带宽度为3.25 eV,具备制作薄膜太阳能电池透明导电电极材料的应用价值.%The aluminum-doped ZnO thin films with [002] oriented were prepared using 2-methoxyethan as a solvent system by the sol-gel method. The composition, structure and optical properties were studied by means of Scanning Electron Microscopy ( SEM ), X-ray Diffraction (XRD) , Energy-dispersive X-ray microanalysis (EDX) and Spectral shape. The results showed that the ZnO films are hexagonal wurtrite structure, which consists of hexagonal rods growing along C axis. The resistivity of the aluminum-doped ZnO thin films decreases with the increase of the content of Al3+. In the visible region, the light Iransmittance of the ZnO thin films with 3% aluminum is about 90% , and the band gap is about 3. 25 eV, which can meet the material requirements for photoelectric devices such as photovoltaic solar cell.
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